The Applied ATON series is an innovative sputter deposition system for solar cell manufacturing. With superior film uniformity and high throughput, the ATON provides high performance with a low cost of ownership. Its modular design, ability to support multiple cathode configurations and accommodate various substrate sizes offer unparalleled production flexibility. This is a high availability system with superior productivity that can be used for deposition of silane-free silicon nitride anti-reflective/passivation layers, transparent conducting oxide, precursors, adhesion layers and back surface reflectors on glass or wafer substrates.